Influence of pressure on chemical vapor deposition of boron nitride from BCl3/NH3/H2 gas mixtures

Published 2019 View Full Article

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Title
Influence of pressure on chemical vapor deposition of boron nitride from BCl3/NH3/H2 gas mixtures
Authors
Keywords
-
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-10-25
DOI
10.1016/j.ceramint.2019.10.218

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