Al1−xScxN Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion

Title
Al1−xScxN Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
Authors
Keywords
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Journal
Micromachines
Volume 13, Issue 8, Pages 1282
Publisher
MDPI AG
Online
2022-08-09
DOI
10.3390/mi13081282

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