Al1−xScxN Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
Published 2022 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Al1−xScxN Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
Authors
Keywords
-
Journal
Micromachines
Volume 13, Issue 8, Pages 1282
Publisher
MDPI AG
Online
2022-08-09
DOI
10.3390/mi13081282
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- From Fully Strained to Relaxed: Epitaxial Ferroelectric Al 1‐ x Sc x N for III‐N Technology
- (2022) Georg Schönweger et al. ADVANCED FUNCTIONAL MATERIALS
- Mapping the Structure of Oxygen-Doped Wurtzite Aluminum Nitride Coatings from Ab Initio Random Structure Search and Experiments
- (2021) Piero Gasparotto et al. ACS Applied Materials & Interfaces
- Oxygen defect dominated photoluminescence emission of ScxAl1−xN grown by molecular beam epitaxy
- (2021) Ping Wang et al. APPLIED PHYSICS LETTERS
- Atomic scale confirmation of ferroelectric polarization inversion in wurtzite-type AlScN
- (2021) Niklas Wolff et al. JOURNAL OF APPLIED PHYSICS
- Improved AlScN/GaN heterostructures grown by metal-organic chemical vapor deposition
- (2021) Christian Manz et al. SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- Clustering of oxygen point defects in transition metal nitrides
- (2021) Rajendra Kumar et al. JOURNAL OF APPLIED PHYSICS
- Stability and residual stresses of sputtered wurtzite AlScN thin films
- (2021) Elmeri Österlund et al. Physical Review Materials
- Post-CMOS Compatible Aluminum Scandium Nitride/2D Channel Ferroelectric Field-Effect-Transistor Memory
- (2021) Xiwen Liu et al. NANO LETTERS
- Ferroelectricity in boron-substituted aluminum nitride thin films
- (2021) John Hayden et al. Physical Review Materials
- Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC cm−2 around 10 nm in thickness
- (2021) Ryoichi Mizutani et al. Applied Physics Express
- N-polar ScAlN and HEMTs grown by molecular beam epitaxy
- (2021) Ping Wang et al. APPLIED PHYSICS LETTERS
- On the exceptional temperature stability of ferroelectric Al1-xScxN thin films
- (2021) Md. Redwanul Islam et al. APPLIED PHYSICS LETTERS
- Strongly temperature dependent ferroelectric switching in AlN, Al1-xScxN, and Al1-xBxN thin films
- (2021) Wanlin Zhu et al. APPLIED PHYSICS LETTERS
- Fully epitaxial ferroelectric ScGaN grown on GaN by molecular beam epitaxy
- (2021) Ding Wang et al. APPLIED PHYSICS LETTERS
- Ferroelectrics everywhere: Ferroelectricity in magnesium substituted zinc oxide thin films
- (2021) Kevin Ferri et al. JOURNAL OF APPLIED PHYSICS
- Anisotropic chemical expansion due to oxygen vacancies in perovskite films
- (2021) M. Tyunina et al. Scientific Reports
- Demonstration of ferroelectricity in ScGaN thin film using sputtering method
- (2021) Masato Uehara et al. APPLIED PHYSICS LETTERS
- AlScN: A III-V semiconductor based ferroelectric
- (2019) Simon Fichtner et al. JOURNAL OF APPLIED PHYSICS
- Optical constants and band gap of wurtzite Al1−xScxN/Al2O3 prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
- (2019) Martina Baeumler et al. JOURNAL OF APPLIED PHYSICS
- Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators
- (2019) Nicolas Kurz et al. JOURNAL OF APPLIED PHYSICS
- Oxygen Incorporation in the Molecular Beam Epitaxy Growth of Sc x Ga 1− x N and Sc x Al 1− x N
- (2019) Joseph Casamento et al. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
- Atomic Resolution Imaging of Nanoscale Chemical Expansion in PrxCe1–xO2−δ during In Situ Heating
- (2018) Jessica G. Swallow et al. ACS Nano
- Temperature Dependence of the Pyroelectric Coefficient of AlScN Thin Films
- (2018) Nicolas Kurz et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Real time in situ x-ray diffraction study of the crystalline structure modification of Ba0.5Sr0.5TiO3 during the post-annealing
- (2018) Sondes Bauer et al. Scientific Reports
- Elastic modulus and coefficient of thermal expansion of piezoelectric Al1−xScxN (up to x = 0.41) thin films
- (2018) Yuan Lu et al. APL Materials
- Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
- (2018) Cosmin Silviu Sandu et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems
- (2017) Simon Fichtner et al. JOURNAL OF APPLIED PHYSICS
- Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
- (2017) Olaf Zywitzki et al. SURFACE & COATINGS TECHNOLOGY
- Formation of metallic cation-oxygen network for anomalous thermal expansion coefficients in binary phosphate glass
- (2017) Yohei Onodera et al. Nature Communications
- Characterization of Precipitates in a Microalloyed Steel Using Quantitative X-ray Diffraction
- (2016) J. Wiskel et al. Metals
- Strongly coupled thermal and chemical expansion in the perovskite oxide system Sr(Ti,Fe)O3−α
- (2015) Nicola H. Perry et al. Journal of Materials Chemistry A
- Stress controlled pulsed direct current co-sputtered Al1−xScxN as piezoelectric phase for micromechanical sensor applications
- (2015) Simon Fichtner et al. APL Materials
- Impacts of Si-doping and resultant cation vacancy formation on the luminescence dynamics for the near-band-edge emission of Al0.6Ga0.4N films grown on AlN templates by metalorganic vapor phase epitaxy
- (2013) S. F. Chichibu et al. JOURNAL OF APPLIED PHYSICS
- Piezoelectric Materials for High Temperature Sensors
- (2011) Shujun Zhang et al. JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Wurtzite structure Sc1−xAlxN solid solution films grown by reactive magnetron sputter epitaxy: Structural characterization and first-principles calculations
- (2010) Carina Höglund et al. JOURNAL OF APPLIED PHYSICS
- Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys
- (2010) Ferenc Tasnádi et al. PHYSICAL REVIEW LETTERS
- Cubic Sc1−xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)
- (2009) Carina Höglund et al. JOURNAL OF APPLIED PHYSICS
- Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
- (2008) Morito Akiyama et al. ADVANCED MATERIALS
- The effect of oxygen incorporation in sputtered scandium nitride films
- (2008) M.A. Moram et al. THIN SOLID FILMS
Add your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload NowAsk a Question. Answer a Question.
Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.
Get Started