Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Published 2008 View Full Article

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Title
Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 21, Issue 5, Pages 593-596
Publisher
Wiley
Online
2008-12-02
DOI
10.1002/adma.200802611

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