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Title
Ferroelectricity in boron-substituted aluminum nitride thin films
Authors
Keywords
-
Journal
Physical Review Materials
Volume 5, Issue 4, Pages -
Publisher
American Physical Society (APS)
Online
2021-04-27
DOI
10.1103/physrevmaterials.5.044412
References
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Related references
Note: Only part of the references are listed.- Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin films
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- (2019) Mohammad Noor-A-Alam et al. ACS Applied Materials & Interfaces
- Optical constants and band gap of wurtzite Al1−xScxN/Al2O3 prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
- (2019) Martina Baeumler et al. JOURNAL OF APPLIED PHYSICS
- Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
- (2018) Cosmin Silviu Sandu et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- Microstructure and piezoelectric response of YxAl1−xN thin films
- (2015) P.M. Mayrhofer et al. ACTA MATERIALIA
- Stress controlled pulsed direct current co-sputtered Al1−xScxN as piezoelectric phase for micromechanical sensor applications
- (2015) Simon Fichtner et al. APL Materials
- Bandgap in Al1−xScxN
- (2013) Ruopeng Deng et al. APPLIED PHYSICS LETTERS
- Incipient Ferroelectricity in Al-Doped HfO2 Thin Films
- (2012) Stefan Mueller et al. ADVANCED FUNCTIONAL MATERIALS
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- (2012) Johannes Müller et al. NANO LETTERS
- Ferroelectricity in hafnium oxide thin films
- (2011) T. S. Böscke et al. APPLIED PHYSICS LETTERS
- A consistent and accurate ab initio parametrization of density functional dispersion correction (DFT-D) for the 94 elements H-Pu
- (2010) Stefan Grimme et al. JOURNAL OF CHEMICAL PHYSICS
- High-excitation and high-resolution photoluminescence spectra of bulk AlN
- (2010) Martin Feneberg et al. PHYSICAL REVIEW B
- A structure zone diagram including plasma-based deposition and ion etching
- (2009) André Anders THIN SOLID FILMS
- Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
- (2008) Morito Akiyama et al. ADVANCED MATERIALS
- Electronic structure and physical properties of stable and metastable phases in YN: density-functional theory calculations
- (2008) PengFei Guan et al. Science Bulletin
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