Wurtzite structure Sc1−xAlxN solid solution films grown by reactive magnetron sputter epitaxy: Structural characterization and first-principles calculations

Title
Wurtzite structure Sc1−xAlxN solid solution films grown by reactive magnetron sputter epitaxy: Structural characterization and first-principles calculations
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 12, Pages 123515
Publisher
AIP Publishing
Online
2010-06-22
DOI
10.1063/1.3448235

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