Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering

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Title
Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
Authors
Keywords
Aluminum scandium nitride films, Pulse magnetron sputtering, Structure, Piezoelectric properties, Young's modulus
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 309, Issue -, Pages 417-422
Publisher
Elsevier BV
Online
2016-11-25
DOI
10.1016/j.surfcoat.2016.11.083

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