Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems
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Title
Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 122, Issue 3, Pages 035301
Publisher
AIP Publishing
Online
2017-07-18
DOI
10.1063/1.4993908
References
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Related references
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- (2012) M. Schneider et al. APPLIED PHYSICS LETTERS
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- Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films
- (2009) Morito Akiyama et al. APPLIED PHYSICS LETTERS
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- Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
- (2008) Morito Akiyama et al. ADVANCED MATERIALS
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