Elastic modulus and coefficient of thermal expansion of piezoelectric Al1−xScxN (up to x = 0.41) thin films

Temperature Dependence of the Pyroelectric Coefficient of AlScN Thin Films

(2018) Nicolas Kurz et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

(2018) Stefan Mertin et al.   SURFACE & COATINGS TECHNOLOGY

Surface Morphology and Microstructure of Pulsed DC Magnetron Sputtered Piezoelectric AlN and AlScN Thin Films

(2017) Yuan Lu et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Impact of high-temperature annealing of AlN layer on sapphire and its thermodynamic principle

(2016) Hiroyuki Fukuyama et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Microstructure and piezoelectric properties of reactively sputtered highly C-axis Sc x Al 1-x N thin films on diamond-like carbon/Si substrate

(2016) Woan Jwu Liauh et al.   SURFACE & COATINGS TECHNOLOGY

Piezoelectric coefficients and spontaneous polarization of ScAlN

(2015) Miguel A Caro et al.   JOURNAL OF PHYSICS-CONDENSED MATTER

Effect of sputtering power on surface characteristics and crystal quality of AlN films deposited by pulsed DC reactive sputtering

(2015) Hiroto Takeuchi et al.   PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS

Stress controlled pulsed direct current co-sputtered Al1−xScxN as piezoelectric phase for micromechanical sensor applications

(2015) Simon Fichtner et al.   APL Materials

The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films

(2014) P. M. Mayrhofer et al.   JOURNAL OF APPLIED PHYSICS

Nanoprobe mechanical and piezoelectric characterization of ScxAl1−xN(0001) thin films

(2014) Agnė Žukauskaitė et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

Elastic constants and critical thicknesses of ScGaN and ScAlN

(2013) S. Zhang et al.   JOURNAL OF APPLIED PHYSICS

Microstructure and dielectric properties of piezoelectric magnetron sputtered w-ScxAl1−xN thin films

(2012) Agne Zukauskaite et al.   JOURNAL OF APPLIED PHYSICS

Increased electromechanical coupling in w−ScxAl1−xN

(2010) Gunilla Wingqvist et al.   APPLIED PHYSICS LETTERS

Temperature-compensated aluminum nitride lamb wave resonators

(2010) Chih-ming Lin et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

Wurtzite structure Sc1−xAlxN solid solution films grown by reactive magnetron sputter epitaxy: Structural characterization and first-principles calculations

(2010) Carina Höglund et al.   JOURNAL OF APPLIED PHYSICS

What is the Young's Modulus of Silicon?

(2010) Matthew A. Hopcroft et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering

(2010) R. E. Sah et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Temperature dependence of the thermal expansion of AlN

(2009) Stephan Figge et al.   APPLIED PHYSICS LETTERS

A micromachined thermally compensated thin film Lamb wave resonator for frequency control and sensing applications

(2009) G Wingqvist et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

(2008) Morito Akiyama et al.   ADVANCED MATERIALS