Optimization of Oxygen Plasma Treatment on Ohmic Contact for AlGaN/GaN HEMTs on High-Resistivity Si Substrate

Title
Optimization of Oxygen Plasma Treatment on Ohmic Contact for AlGaN/GaN HEMTs on High-Resistivity Si Substrate
Authors
Keywords
-
Journal
Electronics
Volume 10, Issue 7, Pages 855
Publisher
MDPI AG
Online
2021-04-04
DOI
10.3390/electronics10070855

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