Optimization of Oxygen Plasma Treatment on Ohmic Contact for AlGaN/GaN HEMTs on High-Resistivity Si Substrate
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Title
Optimization of Oxygen Plasma Treatment on Ohmic Contact for AlGaN/GaN HEMTs on High-Resistivity Si Substrate
Authors
Keywords
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Journal
Electronics
Volume 10, Issue 7, Pages 855
Publisher
MDPI AG
Online
2021-04-04
DOI
10.3390/electronics10070855
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- (2020) Xianhui Li et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- Normally-off p-GaN/AlGaN/GaN high electron mobility transistors using oxygen plasma treatment
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- Ultra-Low Contact Resistivity of < $0.1~\Omega\cdot$ mm for Au-Free TixAly Alloy Contact on Non-Recessed i-AlGaN/GaN
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- (2018) Jinhan Zhang et al. IEEE ELECTRON DEVICE LETTERS
- High RF Performance AlGaN/GaN HEMT Fabricated by Recess-Arrayed Ohmic Contact Technology
- (2018) Yang Lu et al. IEEE ELECTRON DEVICE LETTERS
- Influence factors and temperature reliability of ohmic contact on AlGaN/GaN HEMTs
- (2018) Liang Song et al. AIP Advances
- Ohmic contacts to Gallium Nitride materials
- (2016) Giuseppe Greco et al. APPLIED SURFACE SCIENCE
- Ultralow-Leakage AlGaN/GaN High Electron Mobility Transistors on Si With Non-Alloyed Regrown Ohmic Contacts
- (2016) Bo Song et al. IEEE ELECTRON DEVICE LETTERS
- Yellow luminescence band in undoped GaN revealed by two-wavelength excited photoluminescence
- (2016) M. Julkarnain et al. OPTICAL MATERIALS
- Mechanism of Ti/Al/Ti/W Au-free ohmic contacts to AlGaN/GaN heterostructures via pre-ohmic recess etching and low temperature annealing
- (2015) Jinhan Zhang et al. APPLIED PHYSICS LETTERS
- Low ohmic-contact resistance in AlGaN/GaN high electron mobility transistors with holes etching in ohmic region
- (2015) Chong Wang et al. ELECTRONICS LETTERS
- Low-Temperature Ohmic Contact Formation in GaN High Electron Mobility Transistors Using Microwave Annealing
- (2015) Lin-Qing Zhang et al. IEEE ELECTRON DEVICE LETTERS
- Nanoscale electrical and structural modification induced by rapid thermal oxidation of AlGaN/GaN heterostructures
- (2013) Giuseppe Greco et al. NANOTECHNOLOGY
- Formation of Ohmic contacts in AlGaN/GaN HEMT structures at 500°C by Ohmic contact recess etching
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- Effects of Si Deposition on AlGaN Barrier Surfaces in GaN Heterostructure Field-Effect Transistors
- (2008) Norio Onojima et al. Applied Physics Express
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