Low resistance copper-based ohmic contact for AlGaN/GaN high electron mobility transistors

Title
Low resistance copper-based ohmic contact for AlGaN/GaN high electron mobility transistors
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 103, Issue 15, Pages 152104
Publisher
AIP Publishing
Online
2013-10-09
DOI
10.1063/1.4824894

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