Investigation on the Effect of Annealing Temperature on the Side Ohmic Contact Characteristics for Double Channel GaN/AlGaN Epitaxial Layer

标题
Investigation on the Effect of Annealing Temperature on the Side Ohmic Contact Characteristics for Double Channel GaN/AlGaN Epitaxial Layer
作者
关键词
-
出版物
Micromachines
Volume 13, Issue 5, Pages 791
出版商
MDPI AG
发表日期
2022-05-20
DOI
10.3390/mi13050791

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