Observation and Control of Hot Atom Damage in Ferroelectric Devices

Published 2014 View Full Article

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Title
Observation and Control of Hot Atom Damage in Ferroelectric Devices
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 61, Issue 10, Pages 3490-3498
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-09-17
DOI
10.1109/ted.2014.2347046

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