Impact of layer thickness on the ferroelectric behaviour of silicon doped hafnium oxide thin films

Published 2012 View Full Article

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Title
Impact of layer thickness on the ferroelectric behaviour of silicon doped hafnium oxide thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 533, Issue -, Pages 88-92
Publisher
Elsevier BV
Online
2012-12-20
DOI
10.1016/j.tsf.2012.11.125

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