Preparation and characterization of ferroelectric Hf0.5Zr0.5O2 thin films grown by reactive sputtering

Published 2017 View Full Article

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Title
Preparation and characterization of ferroelectric Hf0.5Zr0.5O2 thin films grown by reactive sputtering
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 28, Issue 30, Pages 305703
Publisher
IOP Publishing
Online
2017-06-01
DOI
10.1088/1361-6528/aa7624

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