Phase transformation behavior of ultrathin Hf0.5Zr0.5O2 films investigated through wide range annealing experiments

Title
Phase transformation behavior of ultrathin Hf0.5Zr0.5O2 films investigated through wide range annealing experiments
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue SB, Pages SBBA07
Publisher
Japan Society of Applied Physics
Online
2019-03-05
DOI
10.7567/1347-4065/ab00f6

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