Atomic layer deposition of Cu with a carbene-stabilized Cu(i) silylamide

A brief review of atomic layer deposition: from fundamentals to applications

(2014) Richard W. Johnson et al.   Materials Today

Precursor design and reaction mechanisms for the atomic layer deposition of metal films

(2013) Karla Bernal Ramos et al.   COORDINATION CHEMISTRY REVIEWS

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

(2013) Ville Miikkulainen et al.   JOURNAL OF APPLIED PHYSICS

Plasma enhanced atomic layer deposition of copper: A comparison of precursors

(2013) D.J. Hagen et al.   SURFACE & COATINGS TECHNOLOGY

Mechanisms of Stranski-Krastanov growth

(2012) Arvind Baskaran et al.   JOURNAL OF APPLIED PHYSICS

Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells

(2012) G. Dingemans et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Deposition of Copper Films with Surface-Activating Agents

(2012) Jeffery S. Thompson et al.   ORGANOMETALLICS

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Facile fabrication of faceted copper nanocrystals with high catalytic activity for p-nitrophenol reduction

(2012) Pinhua Zhang et al.   Journal of Materials Chemistry A

Atomic Layer Deposition of Osmium

(2011) Jani Hämäläinen et al.   CHEMISTRY OF MATERIALS

Low Temperature Growth of High Purity, Low Resistivity Copper Films by Atomic Layer Deposition

(2011) Thomas J. Knisley et al.   CHEMISTRY OF MATERIALS

Palladium nanocrystals enclosed by {100} and {111} facets in controlled proportions and their catalytic activities for formic acid oxidation

(2011) Mingshang Jin et al.   Energy & Environmental Science

Palladium nanoparticles stabilized by polyethylene glycol: Efficient, recyclable catalyst for hydrogenation of styrene and nitrobenzene

(2011) F.A. Harraz et al.   JOURNAL OF CATALYSIS

Understanding 'Clean-Up' of III–V Native Oxides During Atomic Layer Deposition Using Bulk First Principles Models

(2011) Sylwia Klejna et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

CVD of Pure Copper Films from Amidinate Precursor

(2010) Vladislav Krisyuk et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems

(2010) Thomas Waechtler et al.   MICROELECTRONIC ENGINEERING

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications

(2009) L. Wu et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO[sub 2]

(2009) Thomas Waechtler et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Characterization of ALD copper thin films on palladium seed layers

(2009) Irene J. Hsu et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Effects of iodine on the initial growth of MOCVD Cu on MPTMS monolayer surface at a low temperature of 110 °C

(2009) A.R. Kim et al.   THIN SOLID FILMS

GaAs interfacial self-cleaning by atomic layer deposition

(2008) C. L. Hinkle et al.   APPLIED PHYSICS LETTERS

The Role of the Methyl and Hydroxyl Groups of Low-k Dielectric Films on the Nucleation of Ruthenium by ALD

(2008) Jaeyeong Heo et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper

(2008) L. Wu et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

The surface chemistry of thin film atomic layer deposition (ALD) processes for electronic device manufacturing

(2008) Francisco Zaera   JOURNAL OF MATERIALS CHEMISTRY

Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

(2008) David N. Goldstein et al.   Journal of Physical Chemistry C

Vapor phase deposition of copper films with a Cu(I) β-diketiminate precursor

(2008) Jeffery S. Thompson et al.   THIN SOLID FILMS

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

(2008) Hyungjun Kim et al.   THIN SOLID FILMS

Tungsten atomic layer deposition on polymers

(2007) C.A. Wilson et al.   THIN SOLID FILMS