Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry

Published 2008 View Full Article

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Title
Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 112, Issue 49, Pages 19530-19539
Publisher
American Chemical Society (ACS)
Online
2008-11-14
DOI
10.1021/jp804296a

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