The surface chemistry of thin film atomic layer deposition (ALD) processes for electronic device manufacturing

Published 2008 View Full Article

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Title
The surface chemistry of thin film atomic layer deposition (ALD) processes for electronic device manufacturing
Authors
Keywords
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Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 18, Issue 30, Pages 3521
Publisher
Royal Society of Chemistry (RSC)
Online
2008-06-17
DOI
10.1039/b803832e
References
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