Applications of atomic layer deposition to nanofabrication and emerging nanodevices

Published 2008 View Full Article

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Title
Applications of atomic layer deposition to nanofabrication and emerging nanodevices
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 8, Pages 2563-2580
Publisher
Elsevier BV
Online
2008-09-14
DOI
10.1016/j.tsf.2008.09.007

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