The Role of the Methyl and Hydroxyl Groups of Low-k Dielectric Films on the Nucleation of Ruthenium by ALD

Published 2008 View Full Article

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Title
The Role of the Methyl and Hydroxyl Groups of Low-k Dielectric Films on the Nucleation of Ruthenium by ALD
Authors
Keywords
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Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 8, Pages H210
Publisher
The Electrochemical Society
Online
2008-06-14
DOI
10.1149/1.2929064
References
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