Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper

Published 2008 View Full Article

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Title
Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 5, Pages H107
Publisher
The Electrochemical Society
Online
2008-03-15
DOI
10.1149/1.2844207

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