Post Porosity Plasma Protection: Scaling of Efficiency with Porosity

Application of the Protection/Deprotection Strategy to the Science of Porous Materials

(2011) Theo Frot et al.   ADVANCED MATERIALS

A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K ≤ 2.0

(2011) Willi Volksen et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Cryogenic plasmas for controlled processing of nanoporous materials

(2011) Francesca Iacopi et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Molecular Origins of the Mechanical Behavior of Hybrid Glasses

(2010) Mark S. Oliver et al.   ADVANCED FUNCTIONAL MATERIALS

Thick and Crack-Free Nanocrystalline Mesoporous TiO2Films Obtained by Capillary Coating from Aqueous Solutions

(2010) Natacha Krins et al.   CHEMISTRY OF MATERIALS

Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening

(2010) A. M. Urbanowicz et al.   JOURNAL OF APPLIED PHYSICS

Low Dielectric Constant Materials

(2009) Willi Volksen et al.   CHEMICAL REVIEWS

Adjusting the Skeleton and Pore Structure of Porous SiCOH Dielectrics

(2009) S. M. Gates et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage

(2008) E. Todd Ryan et al.   JOURNAL OF APPLIED PHYSICS

Superior mechanical properties of dense and porous organic/inorganic hybrid thin films

(2008) Geraud Dubois et al.   JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY