A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K ≤ 2.0

Molecular Origins of the Mechanical Behavior of Hybrid Glasses

(2010) Mark S. Oliver et al.   ADVANCED FUNCTIONAL MATERIALS

Low Dielectric Constant Materials

(2009) Willi Volksen et al.   CHEMICAL REVIEWS

Adjusting the Skeleton and Pore Structure of Porous SiCOH Dielectrics

(2009) S. M. Gates et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Ultra Low-kFilms Derived from Hyperbranched Polycarbosilanes (HBPCS)

(2008) Jitendra S. Rathore et al.   ADVANCED FUNCTIONAL MATERIALS

Effects of UV cure on glass structure and fracture properties of nanoporous carbon-doped oxide thin films

(2008) David M. Gage et al.   JOURNAL OF APPLIED PHYSICS

Superior mechanical properties of dense and porous organic/inorganic hybrid thin films

(2008) Geraud Dubois et al.   JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY

Thermal furnace and Ultraviolet assisted curing impact on SiOCH spin-on ultra low dielectric constant materials

(2007) A. Zenasni et al.   THIN SOLID FILMS