Effect of porogen residue on electrical characteristics of ultra low-k materials

Published 2010 View Full Article

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Title
Effect of porogen residue on electrical characteristics of ultra low-k materials
Authors
Keywords
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Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 6, Pages 990-993
Publisher
Elsevier BV
Online
2010-12-31
DOI
10.1016/j.mee.2010.12.077

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