标题
Porosity scaling strategies for low-k films
作者
关键词
-
出版物
JOURNAL OF MATERIALS RESEARCH
Volume 30, Issue 22, Pages 3363-3385
出版商
Cambridge University Press (CUP)
发表日期
2015-11-25
DOI
10.1557/jmr.2015.313
参考文献
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Microstructural characteristics and elastic modulus of porous solids
- (2015) Zhangwei Chen et al. ACTA MATERIALIA
- Block Copolymer Packing Limits and Interfacial Reconfigurability in the Assembly of Periodic Mesoporous Organosilicas
- (2015) Andrew W. Wills et al. ADVANCED FUNCTIONAL MATERIALS
- Surface-mounted metal-organic frameworks for applications in sensing and separation
- (2015) Lars Heinke et al. MICROPOROUS AND MESOPOROUS MATERIALS
- Nanoscale Buckling of Ultrathin Low-k Dielectric Lines during Hard-Mask Patterning
- (2015) Gheorghe Stan et al. NANO LETTERS
- Photochemical Growth of Highly Densely Packed Gold Nanoparticle Films for Biomedical Diagnostics
- (2015) Gugu Rutherford et al. ECS Journal of Solid State Science and Technology
- Monolithic, Crystalline MOF Coating: An Excellent Patterning and Photoresist Material
- (2015) Zhengbang Wang et al. ChemNanoMat
- The effect of water uptake on the mechanical properties of low-k organosilicate glass
- (2013) X. Guo et al. JOURNAL OF APPLIED PHYSICS
- Plasma processing of low-k dielectrics
- (2013) Mikhail R. Baklanov et al. JOURNAL OF APPLIED PHYSICS
- Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus
- (2013) Kris Vanstreels et al. LANGMUIR
- Low Damage Cryogenic Etching of Porous Organosilicate Low-k Materials Using SF6/O2/SiF4
- (2013) Liping Zhang et al. ECS Journal of Solid State Science and Technology
- Post Porosity Plasma Protection: Scaling of Efficiency with Porosity
- (2012) Theo Frot et al. ADVANCED FUNCTIONAL MATERIALS
- Engineering ZIF-8 Thin Films for Hybrid MOF-Based Devices
- (2012) Guang Lu et al. ADVANCED MATERIALS
- Intrinsic effect of porosity on mechanical and fracture properties of nanoporous ultralow-k dielectrics
- (2012) K. Vanstreels et al. APPLIED PHYSICS LETTERS
- Metal-Organic Framework ZIF-8 Films As Low-κ Dielectrics in Microelectronics
- (2012) Salvador Eslava et al. CHEMISTRY OF MATERIALS
- Ultra-low-k cyclic carbon-bridged PMO films with a high chemical resistance
- (2012) Frederik Goethals et al. JOURNAL OF MATERIALS CHEMISTRY
- Assembling Photoluminescent Silicon Nanocrystals into Periodic Mesoporous Organosilica
- (2012) Min Guan et al. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
- Epitaxially grown metal-organic frameworks
- (2012) Hartmut Gliemann et al. Materials Today
- Water Repellent Periodic Mesoporous Organosilicas
- (2011) Wendong Wang et al. ACS Nano
- Application of the Protection/Deprotection Strategy to the Science of Porous Materials
- (2011) Theo Frot et al. ADVANCED MATERIALS
- Metal–Organic Framework Thin Films: From Fundamentals to Applications.
- (2011) Angélique Bétard et al. CHEMICAL REVIEWS
- Elastic properties of porous low-k dielectric nano-films
- (2011) W. Zhou et al. JOURNAL OF APPLIED PHYSICS
- Fourier transform infrared spectroscopy investigation of chemical bonding in low-k a-SiC:H thin films
- (2011) S.W. King et al. JOURNAL OF NON-CRYSTALLINE SOLIDS
- Low-kPeriodic Mesoporous Organosilica with Air Walls: POSS-PMO
- (2011) Makoto Seino et al. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
- A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K ≤ 2.0
- (2011) Willi Volksen et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance
- (2011) Premysl Marsik et al. THIN SOLID FILMS
- Ultralow Dielectric Constant Tetravinyltetramethylcyclotetrasiloxane Films Deposited by Initiated Chemical Vapor Deposition (iCVD)
- (2010) Nathan J. Trujillo et al. ADVANCED FUNCTIONAL MATERIALS
- Functional Materials: From Hard to Soft Porous Frameworks
- (2010) Arne Thomas ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
- Cyclodextrin-based reactive porogen for nanoporous ultra-low dielectrics
- (2010) Sung-Kyu Min et al. CURRENT APPLIED PHYSICS
- Crosslinking of porous SiOCH films involving Si–O–C bonds: Impact of deposition and curing
- (2010) O. Gourhant et al. JOURNAL OF APPLIED PHYSICS
- Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening
- (2010) A. M. Urbanowicz et al. JOURNAL OF APPLIED PHYSICS
- Adsorption properties in high optical quality nanoZIF-8 thin films with tunable thickness
- (2010) Aude Demessence et al. JOURNAL OF MATERIALS CHEMISTRY
- Integrated diffusion–recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials
- (2010) E. Kunnen et al. MICROELECTRONIC ENGINEERING
- Effect of porogen residue on electrical characteristics of ultra low-k materials
- (2010) Mikhail R. Baklanov et al. MICROELECTRONIC ENGINEERING
- Chemical structure, network topology, and porosity effects on the mechanical properties of Zeolitic Imidazolate Frameworks
- (2010) J. C. Tan et al. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
- Multi-solvent ellipsometric porosimetry analysis of plasma-treated porous SiOCH films
- (2010) C. Licitra et al. THIN SOLID FILMS
- Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation
- (2010) Premysl Marsik et al. THIN SOLID FILMS
- Low Dielectric Constant Materials
- (2009) Willi Volksen et al. CHEMICAL REVIEWS
- Effect of Porogen Residue on Chemical, Optical, and Mechanical Properties of CVD SiCOH Low-k Materials
- (2009) Adam M. Urbanowicz et al. ELECTROCHEMICAL AND SOLID STATE LETTERS
- Oxygen radical and plasma damage of low-k organosilicate glass materials: Diffusion-controlled mechanism for carbon depletion
- (2009) M. A. Goldman et al. JOURNAL OF APPLIED PHYSICS
- The effect of porogen loading on the stiffness and fracture energy of brittle organosilicates
- (2009) Han Li et al. JOURNAL OF MATERIALS RESEARCH
- Adjusting the Skeleton and Pore Structure of Porous SiCOH Dielectrics
- (2009) S. M. Gates et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- 32nm node BEOL integration with an extreme low-k porous SiOCH dielectric k=2.3
- (2009) K. Hamioud et al. MICROELECTRONIC ENGINEERING
- Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics
- (2009) V. Jousseaume et al. THIN SOLID FILMS
- Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage
- (2008) E. Todd Ryan et al. JOURNAL OF APPLIED PHYSICS
- Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
- (2008) Geraud Dubois et al. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
- Tortuosity-porosity relation in porous media flow
- (2008) Maciej Matyka et al. PHYSICAL REVIEW E
- Silica aerogel; synthesis, properties and characterization
- (2007) A. Soleimani Dorcheh et al. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
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