Oxygen radical and plasma damage of low-k organosilicate glass materials: Diffusion-controlled mechanism for carbon depletion

Published 2009 View Full Article

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Title
Oxygen radical and plasma damage of low-k organosilicate glass materials: Diffusion-controlled mechanism for carbon depletion
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 1, Pages 013311
Publisher
AIP Publishing
Online
2009-07-14
DOI
10.1063/1.3168428
References
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