Nanoscale Buckling of Ultrathin Low-k Dielectric Lines during Hard-Mask Patterning

Published 2015 View Full Article

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Title
Nanoscale Buckling of Ultrathin Low-k Dielectric Lines during Hard-Mask Patterning
Authors
Keywords
-
Journal
NANO LETTERS
Volume 15, Issue 6, Pages 3845-3850
Publisher
American Chemical Society (ACS)
Online
2015-05-08
DOI
10.1021/acs.nanolett.5b00685

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