Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics

Published 2009 View Full Article

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Title
Influence of polymer porogens on the porosity and mechanical properties of spin coated Ultra Low k dielectrics
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 15, Pages 4413-4418
Publisher
Elsevier BV
Online
2009-02-22
DOI
10.1016/j.tsf.2009.02.084

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