Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance

Published 2011 View Full Article

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Title
Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 11, Pages 3619-3626
Publisher
Elsevier BV
Online
2011-02-02
DOI
10.1016/j.tsf.2011.01.339

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