Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation

Published 2010 View Full Article

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Title
Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 15, Pages 4266-4272
Publisher
Elsevier BV
Online
2010-01-12
DOI
10.1016/j.tsf.2009.12.110

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