Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

Bioglass implant-coating interactions in synthetic physiological fluids with varying degrees of biomimicry

(2017) Adrian-Claudiu Popa et al.   International Journal of Nanomedicine

Tuning the biocompatibility of aluminum nitride

(2017) Nora G. Berg et al.   MATERIALS LETTERS

Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride

(2017) Marius Knapp et al.   Nanomaterials

Submicrometer Hollow Bioglass Cones Deposited by Radio Frequency Magnetron Sputtering: Formation Mechanism, Properties, and Prospective Biomedical Applications

(2016) A. C. Popa et al.   ACS Applied Materials & Interfaces

Transparent field-effect transistors based on AlN-gate dielectric and IGZO-channel semiconductor

(2016) C. Besleaga et al.   APPLIED SURFACE SCIENCE

Fabrication and characterization of aluminum nitride thick film coated on aluminum substrate for heat dissipation

(2016) Byung-Dong Hahn et al.   CERAMICS INTERNATIONAL

Thickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition

(2016) Liviu Duta et al.   Materials

Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique

(2016) Bin Peng et al.   Materials

Low temperature aluminum nitride thin films for sensory applications

(2016) E. Yarar et al.   AIP Advances

Electrostatic Self-Assembly of Diamond Nanoparticles onto Al- and N-Polar Sputtered Aluminum Nitride Surfaces

(2016) Taro Yoshikawa et al.   Nanomaterials

Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics

(2015) Y. Lu et al.   APPLIED PHYSICS LETTERS

Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate

(2015) G.E. Stan et al.   APPLIED SURFACE SCIENCE

Comparison of the high-temperature corrosion of aluminium nitride, alumina, magnesia and zirconia ceramics by coal ashes

(2015) Gert Himpel et al.   CERAMICS INTERNATIONAL

High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing

(2015) Jenna L. Fu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers

(2015) Yipeng Lu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering for SAW applications

(2015) K Ait Aissa et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites

(2015) Khaled Sayed Elbadawi Ramadan et al.   PLoS One

Deposition and characterization of AlN thin films on ceramic electric insulators using pulsed DC magnetron sputtering

(2015) Maurício Marlon Mazur et al.   SURFACE & COATINGS TECHNOLOGY

Characterization of tribological behavior and wear mechanisms of novel oxynitride PVD coatings designed for applications at high temperatures

(2015) Jiri Nohava et al.   TRIBOLOGY INTERNATIONAL

Biosensor for human IgE detection using shear-mode FBAR devices

(2015) Ying-Chung Chen et al.   Nanoscale Research Letters

Pyroelectric aluminum nitride micro electromechanical systems infrared sensor with wavelength-selective infrared absorber

(2014) Kansho Yamamoto et al.   APPLIED PHYSICS LETTERS

A piezoelectric micro-electromechanical microphone for implantable hearing aid applications

(2014) Nazli Zargarpour et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Strong bonding between sputtered bioglass–ceramic films and Ti-substrate implants induced by atomic inter-diffusion post-deposition heat-treatments

(2013) G.E. Stan et al.   APPLIED SURFACE SCIENCE

Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance

(2013) Nathan Jackson et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications

(2013) Nathan Jackson et al.   Smart Materials and Structures

Nanomechanical characterization of bioglass films synthesized by magnetron sputtering

(2013) A.C. Popa et al.   THIN SOLID FILMS

Solar-Blind Photodetectors for Harsh Electronics

(2013) Dung-Sheng Tsai et al.   Scientific Reports

AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators

(2012) Chih-Ming Lin et al.   ADVANCED MATERIALS

An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications

(2012) Matthew D. Williams et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited onc-Plane Sapphire

(2012) Sheng-Rui Jian et al.   Journal of Nanomaterials

Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering

(2012) Xiangqin Meng et al.   MATERIALS LETTERS

Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering

(2012) Aurelian C. Galca et al.   THIN SOLID FILMS

Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering

(2011) C Duquenne et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures

(2011) Mustafa Alevli et al.   PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

AlNx and a-SiOx coatings with corrosion resistance properties for dental implants

(2011) Rossana Gazia et al.   SURFACE & COATINGS TECHNOLOGY

AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices

(2010) Chih-Ming Lin et al.   APPLIED PHYSICS LETTERS

Synthesis of c-axis oriented AlN thin films on different substrates: A review

(2010) G.F. Iriarte et al.   MATERIALS RESEARCH BULLETIN

Detection of carcinoembryonic antigen using AlN FBAR

(2010) Tae Yong Lee et al.   THIN SOLID FILMS

Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering

(2009) Ping-Feng Yang et al.   APPLIED SURFACE SCIENCE

Effect of annealing upon the structure and adhesion properties of sputtered bio-glass/titanium coatings

(2009) G.E. Stan et al.   APPLIED SURFACE SCIENCE

AlN on silicon based surface acoustic wave resonators operating at 5 GHz

(2009) D. Neculoiu et al.   ELECTRONICS LETTERS

Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

(2009) R.H. Olsson et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Effects of pulse parameters on the pulsed-DC reactive sputtering of AlN thin films

(2009) J.S. Cherng et al.   VACUUM

Far-infrared transmission in GaN, AlN, and AlGaN thin films grown by molecular beam epitaxy

(2008) J. Ibáñez et al.   JOURNAL OF APPLIED PHYSICS

Influence of Bilayer Period on the Characteristics of Nanometre-Scale ZrN/TiAlN Multilayers

(2008) A. Vladescu et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Characteristics of arc plasma deposited TiAlZrCN coatings

(2008) M. Balaceanu et al.   SURFACE & COATINGS TECHNOLOGY

XPS analysis of aluminum nitride films deposited by plasma source molecular beam epitaxy

(2008) Leland Rosenberger et al.   SURFACE AND INTERFACE ANALYSIS