Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering

Published 2012 View Full Article

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Title
Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering
Authors
Keywords
-
Journal
MATERIALS LETTERS
Volume 90, Issue -, Pages 49-52
Publisher
Elsevier BV
Online
2012-09-13
DOI
10.1016/j.matlet.2012.09.010

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