Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures

Properties of AlN grown by plasma enhanced atomic layer deposition

(2011) Markus Bosund et al.   APPLIED SURFACE SCIENCE

GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride

(2010) M. Bosund et al.   APPLIED SURFACE SCIENCE

Optical Properties of Amorphous AlN Thin Films on Glass and Silicon Substrates Grown by Single Ion Beam Sputtering

(2010) Fatemeh Hajakbari et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Fabrication and Properties of AlN Film on GaN Substrate by Using Remote Plasma Atomic Layer Deposition Method

(2009) Kwang-Ho Kim et al.   Electronic Materials Letters

High quality AlN grown on SiC by metal organic chemical vapor deposition

(2008) Z. Chen et al.   APPLIED PHYSICS LETTERS

XPS analysis of aluminum nitride films deposited by plasma source molecular beam epitaxy

(2008) Leland Rosenberger et al.   SURFACE AND INTERFACE ANALYSIS