Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique

Preparation of highlyc-axis oriented AlN thin films on Hastelloy tapes with Y2O3buffer layer for flexible SAW sensor applications

(2016) Bin Peng et al.   Functional Materials Letters

Effect of Al substrate nitridation on the properties of AlN films grown by pulsed laser deposition and its mechanism

(2015) Wenliang Wang et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Growth of c-axis oriented AlN thin films on titanium alloy substrate by middle frequency magnetron sputtering

(2015) Jianying Jiang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Characterization of Differentially Measured Strain Using Passive Wireless Surface Acoustic Wave (SAW) Strain Sensors

(2014) Rory Stoney et al.   IEEE SENSORS JOURNAL

GaN/Si based single SAW resonator temperature sensor operating in the GHz frequency range

(2014) A. Müller et al.   SENSORS AND ACTUATORS A-PHYSICAL

Topology management techniques for tolerating node failures in wireless sensor networks: A survey

(2013) Mohamed Younis et al.   Computer Networks

Characteristics of surface acoustic waves excited by (1120) zno films deposited on R-sapphire substrates

(2013) Yan Wang et al.   IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL

High sensitivity humidity sensors using flexible surface acoustic wave devices made on nanocrystalline ZnO/polyimide substrates

(2013) X. L. He et al.   Journal of Materials Chemistry C

Effects of AlN nucleation layers on the growth of AlN films using high temperature hydride vapor phase epitaxy

(2012) M. Balaji et al.   JOURNAL OF ALLOYS AND COMPOUNDS

Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering

(2012) H. Jin et al.   THIN SOLID FILMS

Solution deposition planarization of long-length flexible substrates

(2011) Chris Sheehan et al.   APPLIED PHYSICS LETTERS

Synthesis of c-axis oriented AlN thin films on different substrates: A review

(2010) G.F. Iriarte et al.   MATERIALS RESEARCH BULLETIN

Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering

(2009) S. M. Tanner et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Application of membrane separation processes in petrochemical industry: a review

(2008) Maryam Takht Ravanchi et al.   DESALINATION