Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate

Published 2015 View Full Article

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Title
Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate
Authors
Keywords
Aluminum nitride, Thin films, Pyroelectric detection
Journal
APPLIED SURFACE SCIENCE
Volume 353, Issue -, Pages 1195-1202
Publisher
Elsevier BV
Online
2015-07-15
DOI
10.1016/j.apsusc.2015.07.059

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