Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering

Published 2012 View Full Article

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Title
Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 524, Issue -, Pages 328-333
Publisher
Elsevier BV
Online
2012-10-16
DOI
10.1016/j.tsf.2012.10.015

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