Synthesis of c-axis oriented AlN thin films on different substrates: A review

Published 2010 View Full Article

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Title
Synthesis of c-axis oriented AlN thin films on different substrates: A review
Authors
Keywords
-
Journal
MATERIALS RESEARCH BULLETIN
Volume 45, Issue 9, Pages 1039-1045
Publisher
Elsevier BV
Online
2010-06-05
DOI
10.1016/j.materresbull.2010.05.035

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