Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering

Published 2011 View Full Article

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Title
Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 1, Pages 015301
Publisher
IOP Publishing
Online
2011-12-09
DOI
10.1088/0022-3727/45/1/015301

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