Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure
出版年份 2017 全文链接
标题
Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure
作者
关键词
-
出版物
Nanomaterials
Volume 7, Issue 11, Pages 394
出版商
MDPI AG
发表日期
2017-11-18
DOI
10.3390/nano7110394
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Bioglass implant-coating interactions in synthetic physiological fluids with varying degrees of biomimicry
- (2017) Adrian-Claudiu Popa et al. International Journal of Nanomedicine
- Tuning the biocompatibility of aluminum nitride
- (2017) Nora G. Berg et al. MATERIALS LETTERS
- Wettability Investigations and Wet Transfer Enhancement of Large-Area CVD-Graphene on Aluminum Nitride
- (2017) Marius Knapp et al. Nanomaterials
- Submicrometer Hollow Bioglass Cones Deposited by Radio Frequency Magnetron Sputtering: Formation Mechanism, Properties, and Prospective Biomedical Applications
- (2016) A. C. Popa et al. ACS Applied Materials & Interfaces
- Transparent field-effect transistors based on AlN-gate dielectric and IGZO-channel semiconductor
- (2016) C. Besleaga et al. APPLIED SURFACE SCIENCE
- Fabrication and characterization of aluminum nitride thick film coated on aluminum substrate for heat dissipation
- (2016) Byung-Dong Hahn et al. CERAMICS INTERNATIONAL
- Thickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition
- (2016) Liviu Duta et al. Materials
- Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique
- (2016) Bin Peng et al. Materials
- Low temperature aluminum nitride thin films for sensory applications
- (2016) E. Yarar et al. AIP Advances
- Electrostatic Self-Assembly of Diamond Nanoparticles onto Al- and N-Polar Sputtered Aluminum Nitride Surfaces
- (2016) Taro Yoshikawa et al. Nanomaterials
- Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics
- (2015) Y. Lu et al. APPLIED PHYSICS LETTERS
- Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate
- (2015) G.E. Stan et al. APPLIED SURFACE SCIENCE
- Comparison of the high-temperature corrosion of aluminium nitride, alumina, magnesia and zirconia ceramics by coal ashes
- (2015) Gert Himpel et al. CERAMICS INTERNATIONAL
- High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing
- (2015) Jenna L. Fu et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- A High Fill-Factor Annular Array of High Frequency Piezoelectric Micromachined Ultrasonic Transducers
- (2015) Yipeng Lu et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering for SAW applications
- (2015) K Ait Aissa et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
- (2015) Khaled Sayed Elbadawi Ramadan et al. PLoS One
- Deposition and characterization of AlN thin films on ceramic electric insulators using pulsed DC magnetron sputtering
- (2015) Maurício Marlon Mazur et al. SURFACE & COATINGS TECHNOLOGY
- Characterization of tribological behavior and wear mechanisms of novel oxynitride PVD coatings designed for applications at high temperatures
- (2015) Jiri Nohava et al. TRIBOLOGY INTERNATIONAL
- Biosensor for human IgE detection using shear-mode FBAR devices
- (2015) Ying-Chung Chen et al. Nanoscale Research Letters
- Pyroelectric aluminum nitride micro electromechanical systems infrared sensor with wavelength-selective infrared absorber
- (2014) Kansho Yamamoto et al. APPLIED PHYSICS LETTERS
- A piezoelectric micro-electromechanical microphone for implantable hearing aid applications
- (2014) Nazli Zargarpour et al. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
- Strong bonding between sputtered bioglass–ceramic films and Ti-substrate implants induced by atomic inter-diffusion post-deposition heat-treatments
- (2013) G.E. Stan et al. APPLIED SURFACE SCIENCE
- Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance
- (2013) Nathan Jackson et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications
- (2013) Nathan Jackson et al. Smart Materials and Structures
- Nanomechanical characterization of bioglass films synthesized by magnetron sputtering
- (2013) A.C. Popa et al. THIN SOLID FILMS
- Solar-Blind Photodetectors for Harsh Electronics
- (2013) Dung-Sheng Tsai et al. Scientific Reports
- AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
- (2012) Chih-Ming Lin et al. ADVANCED MATERIALS
- An AlN MEMS Piezoelectric Microphone for Aeroacoustic Applications
- (2012) Matthew D. Williams et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited onc-Plane Sapphire
- (2012) Sheng-Rui Jian et al. Journal of Nanomaterials
- Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering
- (2012) Xiangqin Meng et al. MATERIALS LETTERS
- Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering
- (2012) Aurelian C. Galca et al. THIN SOLID FILMS
- Thermal conductivity of aluminium nitride thin films prepared by reactive magnetron sputtering
- (2011) C Duquenne et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
- (2011) Mustafa Alevli et al. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
- AlNx and a-SiOx coatings with corrosion resistance properties for dental implants
- (2011) Rossana Gazia et al. SURFACE & COATINGS TECHNOLOGY
- AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices
- (2010) Chih-Ming Lin et al. APPLIED PHYSICS LETTERS
- Synthesis of c-axis oriented AlN thin films on different substrates: A review
- (2010) G.F. Iriarte et al. MATERIALS RESEARCH BULLETIN
- Detection of carcinoembryonic antigen using AlN FBAR
- (2010) Tae Yong Lee et al. THIN SOLID FILMS
- Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering
- (2009) Ping-Feng Yang et al. APPLIED SURFACE SCIENCE
- Effect of annealing upon the structure and adhesion properties of sputtered bio-glass/titanium coatings
- (2009) G.E. Stan et al. APPLIED SURFACE SCIENCE
- AlN on silicon based surface acoustic wave resonators operating at 5 GHz
- (2009) D. Neculoiu et al. ELECTRONICS LETTERS
- Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers
- (2009) R.H. Olsson et al. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- Effects of pulse parameters on the pulsed-DC reactive sputtering of AlN thin films
- (2009) J.S. Cherng et al. VACUUM
- Far-infrared transmission in GaN, AlN, and AlGaN thin films grown by molecular beam epitaxy
- (2008) J. Ibáñez et al. JOURNAL OF APPLIED PHYSICS
- Influence of Bilayer Period on the Characteristics of Nanometre-Scale ZrN/TiAlN Multilayers
- (2008) A. Vladescu et al. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Characteristics of arc plasma deposited TiAlZrCN coatings
- (2008) M. Balaceanu et al. SURFACE & COATINGS TECHNOLOGY
- XPS analysis of aluminum nitride films deposited by plasma source molecular beam epitaxy
- (2008) Leland Rosenberger et al. SURFACE AND INTERFACE ANALYSIS
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExploreCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now