Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
Published 2015 View Full Article
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Title
Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
Authors
Keywords
Aluminum, Thin films, Crystallization seeding, Nanomaterials, Capacitors, Dielectrics, Mechanical stress, X-ray diffraction
Journal
PLoS One
Volume 10, Issue 7, Pages e0133479
Publisher
Public Library of Science (PLoS)
Online
2015-07-21
DOI
10.1371/journal.pone.0133479
References
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- (2012) Remko van den Hurk et al. SENSORS AND ACTUATORS B-CHEMICAL
- Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering
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- Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering
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- Highly compliant static microcantilevers fabricated in gold nanocomposite materials
- (2011) N Nelson-Fitzpatrick et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection
- (2011) P Ivaldi et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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- Bacteriophage tailspike proteins as molecular probes for sensitive and selective bacterial detection
- (2010) Amit Singh et al. BIOSENSORS & BIOELECTRONICS
- The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films
- (2010) A. Ababneh et al. Materials Science and Engineering B-Advanced Functional Solid-State Materials
- Nanocrystalline–amorphous transitions in Al–Mo thin films: Bulk and surface evolution
- (2009) C. Ophus et al. ACTA MATERIALIA
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- Nanoenabled microelectromechanical sensor for volatile organic chemical detection
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- Piezoelectric MEMS sensors: state-of-the-art and perspectives
- (2009) S Tadigadapa et al. MEASUREMENT SCIENCE and TECHNOLOGY
- High sensitivity detection of 16s rRNA using peptide nucleic acid probes and a surface plasmon resonance biosensor
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- Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications
- (2008) E Luber et al. NANOTECHNOLOGY
- A self-sustaining ultrahigh-frequency nanoelectromechanical oscillator
- (2008) X. L. Feng et al. Nature Nanotechnology
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- A CMOS-based integrated-system architecture for a static cantilever array
- (2007) M. Zimmermann et al. SENSORS AND ACTUATORS B-CHEMICAL
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