Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites

Title
Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
Authors
Keywords
Aluminum, Thin films, Crystallization seeding, Nanomaterials, Capacitors, Dielectrics, Mechanical stress, X-ray diffraction
Journal
PLoS One
Volume 10, Issue 7, Pages e0133479
Publisher
Public Library of Science (PLoS)
Online
2015-07-21
DOI
10.1371/journal.pone.0133479

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