Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors
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Title
Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors
Authors
Keywords
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Journal
Nanoscale
Volume 8, Issue 22, Pages 11595-11601
Publisher
Royal Society of Chemistry (RSC)
Online
2016-05-04
DOI
10.1039/c6nr01409g
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