Plasma etch transfer of self-assembled polymer patterns

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(2018)   ADVANCED MATERIALS

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates

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Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis

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Impact of Out-of-Plane Translational Order in Block Copolymer Lithography

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Degree of Perfection and Pattern Uniformity in the Directed Assembly of Cylinder-Forming Block Copolymer on Chemically Patterned Surfaces

(2011) Huiman Kang et al.   MACROMOLECULES

Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

(2010) Joy Y. Cheng et al.   ACS Nano

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

(2010) Qing Peng et al.   ADVANCED MATERIALS

Block Copolymer Based Nanostructures: Materials, Processes, and Applications to Electronics

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Soft Graphoepitaxy of Block Copolymer Assembly with Disposable Photoresist Confinement

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Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars

(2009) M D Henry et al.   NANOTECHNOLOGY

Si-containing block copolymers for self-assembled nanolithography

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Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography

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Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

(2008) R. Ruiz et al.   SCIENCE

Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

(2008) I. Bita et al.   SCIENCE