Directed self-assembly of block copolymers for next generation nanolithography

Published 2013 View Full Article

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Title
Directed self-assembly of block copolymers for next generation nanolithography
Authors
Keywords
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Journal
Materials Today
Volume 16, Issue 12, Pages 468-476
Publisher
Elsevier BV
Online
2013-12-08
DOI
10.1016/j.mattod.2013.11.002

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