Scale-up of a Chemo-Epitaxy Flow for Feature Multiplication Using Directed Self- Assembly of Block-Copolymers

Published 2014 View Full Article

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Title
Scale-up of a Chemo-Epitaxy Flow for Feature Multiplication Using Directed Self- Assembly of Block-Copolymers
Authors
Keywords
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Journal
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 26, Issue 6, Pages 831-839
Publisher
Technical Association of Photopolymers, Japan
Online
2014-02-04
DOI
10.2494/photopolymer.26.831

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