Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers

Published 2009 View Full Article

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Title
Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
Authors
Keywords
-
Journal
ACCOUNTS OF CHEMICAL RESEARCH
Volume 42, Issue 4, Pages 498-508
Publisher
American Chemical Society (ACS)
Online
2009-02-27
DOI
10.1021/ar800105q

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