Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors
出版年份 2016 全文链接
标题
Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors
作者
关键词
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出版物
Nanoscale
Volume 8, Issue 22, Pages 11595-11601
出版商
Royal Society of Chemistry (RSC)
发表日期
2016-05-04
DOI
10.1039/c6nr01409g
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- (2016) Tandra Ghoshal et al. Nanoscale
- Aligned silicon nanofins via the directed self-assembly of PS-b-P4VP block copolymer and metal oxide enhanced pattern transfer
- (2015) Cian Cummins et al. Nanoscale
- High χ–Low N Block Polymers: How Far Can We Go?
- (2015) Christophe Sinturel et al. ACS Macro Letters
- Poly(cyclohexylethylene)-block-poly(ethylene oxide) Block Polymers for Metal Oxide Templating
- (2015) Morgan W. Schulze et al. ACS Macro Letters
- Atomic Layer Deposition Assisted Pattern Multiplication of Block Copolymer Lithography for 5 nm Scale Nanopatterning
- (2014) Hyoung-Seok Moon et al. ADVANCED FUNCTIONAL MATERIALS
- Scale-up of a Chemo-Epitaxy Flow for Feature Multiplication Using Directed Self- Assembly of Block-Copolymers
- (2014) Paulina Rincon-Delgadillo et al. JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
- Rational Design of a Block Copolymer with a High Interaction Parameter
- (2014) Daniel P. Sweat et al. MACROMOLECULES
- Continuous Equilibrated Growth of Ordered Block Copolymer Thin Films by Electrospray Deposition
- (2013) Hanqiong Hu et al. ACS Nano
- Robust Superhydrophobicity in Large-Area Nanostructured Surfaces Defined by Block-Copolymer Self Assembly
- (2013) Antonio Checco et al. ADVANCED MATERIALS
- Directed self-assembly of block copolymers for next generation nanolithography
- (2013) Seong-Jun Jeong et al. Materials Today
- Orientation and Alignment Control of Microphase-Separated PS-b-PDMS Substrate Patterns via Polymer Brush Chemistry
- (2012) Dipu Borah et al. ACS Applied Materials & Interfaces
- Morphology Control in Block Copolymer Films Using Mixed Solvent Vapors
- (2012) Kevin W. Gotrik et al. ACS Nano
- Effect of Film Thickness and Domain Spacing on Defect Densities in Directed Self-Assembly of Cylindrical Morphology Block Copolymers
- (2012) Vindhya Mishra et al. ACS Nano
- High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates
- (2012) Xiaodan Gu et al. ADVANCED MATERIALS
- Plasma etch transfer of self-assembled polymer patterns
- (2012) Danvers E. Johnston Journal of Micro-Nanolithography MEMS and MOEMS
- Morphology Evolution of PS-b-P2VP Diblock Copolymers via Supramolecular Assembly of Hydroxylated Gold Nanoparticles
- (2012) Se Gyu Jang et al. MACROMOLECULES
- Synthesis, Thermodynamics, and Dynamics of Poly(4-tert-butylstyrene-b-methyl methacrylate)
- (2012) Justin G. Kennemur et al. MACROMOLECULES
- High-Aspect-Ratio Perpendicular Orientation of PS-b-PDMS Thin Films under Solvent Annealing
- (2012) Jeong Gon Son et al. ACS Macro Letters
- A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
- (2011) Qing Peng et al. ACS Nano
- Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
- (2011) Yu-Chih Tseng et al. Journal of Physical Chemistry C
- Highly Tunable Self-Assembled Nanostructures from a Poly(2-vinylpyridine-b-dimethylsiloxane) Block Copolymer
- (2011) Jae Won Jeong et al. NANO LETTERS
- Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
- (2010) Qing Peng et al. ADVANCED MATERIALS
- A Path to Ultranarrow Patterns Using Self-Assembled Lithography
- (2010) Yeon Sik Jung et al. NANO LETTERS
- Controlling Order in Block Copolymer Thin Films for Nanopatterning Applications
- (2010) Andrew P. Marencic et al. Annual Review of Chemical and Biomolecular Engineering
- Block Copolymer Nanostructures for Technology
- (2010) Yu-Chih Tseng et al. Polymers
- Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
- (2009) Steven M. George et al. ACCOUNTS OF CHEMICAL RESEARCH
- Atomic Layer Deposition: An Overview
- (2009) Steven M. George CHEMICAL REVIEWS
- Highly selective incorporation of SiO2 nanoparticles in PS-b-P2VP block copolymers by quaternization
- (2009) Won-Jeong Shin et al. JOURNAL OF MATERIALS CHEMISTRY
- Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order
- (2009) S. Park et al. SCIENCE
- Using Cylindrical Domains of Block Copolymers To Self-Assemble and Align Metallic Nanowires
- (2008) Jinan Chai et al. ACS Nano
- Si-containing block copolymers for self-assembled nanolithography
- (2008) C. A. Ross et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Potential of a rotary stage electron beam mastering system for fabricating patterned magnetic media
- (2008) T. Miyazaki et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly
- (2008) R. Ruiz et al. SCIENCE
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