Atomic Layer Deposition Assisted Pattern Multiplication of Block Copolymer Lithography for 5 nm Scale Nanopatterning

Dependence of the capacitance between an electrode and an electrolyte solution on the thickness of aluminum oxide layers deposited using atomic layer deposition

(2013) Hyunwoo Lee et al.   JOURNAL OF ELECTROANALYTICAL CHEMISTRY

Highly ordered freestanding titanium oxide nanotube arrays using Si-containing block copolymer lithography and atomic layer deposition

(2013) Se Jin Ku et al.   NANOTECHNOLOGY

Directed self-assembly of block copolymers for universal nanopatterning

(2013) Bong Hoon Kim et al.   Soft Matter

Emerging trends in metal-containing block copolymers: synthesis, self-assembly, and nanomanufacturing applications

(2013) Muruganathan Ramanathan et al.   Journal of Materials Chemistry C

Alucone Interlayers to Minimize Stress Caused by Thermal Expansion Mismatch between Al2O3 Films and Teflon Substrates

(2012) Shih-Hui Jen et al.   ACS Applied Materials & Interfaces

Oligosaccharide/Silicon-Containing Block Copolymers with 5 nm Features for Lithographic Applications

(2012) Julia D. Cushen et al.   ACS Nano

High Aspect Ratio Sub-15 nm Silicon Trenches From Block Copolymer Templates

(2012) Xiaodan Gu et al.   ADVANCED MATERIALS

Enhanced Lithographic Imaging Layer Meets Semiconductor Manufacturing Specification a Decade Early

(2012) Yu-Chih Tseng et al.   ADVANCED MATERIALS

Large-area, highly oriented lamellar block copolymer nanopatterning directed by graphoepitaxially assembled cylinder nanopatterns

(2012) Hyoung-Seok Moon et al.   JOURNAL OF MATERIALS CHEMISTRY

The Sub-Micron Hole Array in Sapphire Produced by Inductively-Coupled Plasma Reactive Ion Etching

(2012) Ming-Hua Shiao et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Efficient Hydrogenated Amorphous Silicon Thin-Film Solar Cells Using Zinc Oxide Deposited by Atomic Layer Deposition as a Protective Interfacial Layer

(2012) Young-Joo Lee et al.   Journal of Physical Chemistry C

Polarity-Switching Top Coats Enable Orientation of Sub-10-nm Block Copolymer Domains

(2012) C. M. Bates et al.   SCIENCE

Directed Self-Assembly with Sub-100 Degrees Celsius Processing Temperature, Sub-10 Nanometer Resolution, and Sub-1 Minute Assembly Time

(2012) Woon Ik Park et al.   Small

Air-Stable Inverted Organic Solar Cells with an Ultrathin Electron-Transport Layer Made by Atomic Layer Deposition

(2012) Y.-J. Kang et al.   ECS Solid State Letters

Three-Dimensional Multilayered Nanostructures with Controlled Orientation of Microdomains from Cross-Linkable Block Copolymers

(2011) Hyunjung Jung et al.   ACS Nano

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates

(2011) Qing Peng et al.   ACS Nano

Mussel-Inspired Block Copolymer Lithography for Low Surface Energy Materials of Teflon, Graphene, and Gold

(2011) Bong Hoon Kim et al.   ADVANCED MATERIALS

Ultralarge-area block copolymer lithography via soft graphoepitaxy

(2011) Seong-Jun Jeong et al.   JOURNAL OF MATERIALS CHEMISTRY

Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis

(2011) Yu-Chih Tseng et al.   Journal of Physical Chemistry C

Atomic Layer Deposition of Ta-doped TiO2 Electrodes for Dye-Sensitized Solar Cells

(2011) Ji-Hwan Choi et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Ultralarge-Area Block Copolymer Lithography Enabled by Disposable Photoresist Prepatterning

(2010) Seong-Jun Jeong et al.   ACS Nano

Sub-Nanometer Level Size Tuning of a Monodisperse Nanoparticle Array Via Block Copolymer Lithography

(2010) Dong Ok Shin et al.   ADVANCED FUNCTIONAL MATERIALS

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

(2010) Qing Peng et al.   ADVANCED MATERIALS

One-Dimensional Metal Nanowire Assembly via Block Copolymer Soft Graphoepitaxy

(2010) Seong-Jun Jeong et al.   NANO LETTERS

A Path to Ultranarrow Patterns Using Self-Assembled Lithography

(2010) Yeon Sik Jung et al.   NANO LETTERS

Peptide-templating dye-sensitized solar cells

(2010) Tae Hee Han et al.   NANOTECHNOLOGY

Fabrication and Electrochemical Characterization of TiO2 Three-Dimensional Nanonetwork Based on Peptide Assembly

(2009) Sung-Wook Kim et al.   ACS Nano

Spontaneous Lamellar Alignment in Thickness-Modulated Block Copolymer Films

(2009) Bong Hoon Kim et al.   ADVANCED FUNCTIONAL MATERIALS

Nanoimprint Lithography Materials Development for Semiconductor Device Fabrication

(2009) Elizabeth A. Costner et al.   Annual Review of Materials Research

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Highly entangled hollow TiO2 nanoribbons templating diphenylalanine assembly

(2009) Tae Hee Han et al.   JOURNAL OF MATERIALS CHEMISTRY

A Decade of Step and Flash Imprint Lithography

(2009) C. Grant Wilson   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Small-molecule-directed nanoparticle assembly towards stimuli-responsive nanocomposites

(2009) Yue Zhao et al.   NATURE MATERIALS

Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order

(2009) S. Park et al.   SCIENCE

Universal Block Copolymer Lithography for Metals, Semiconductors, Ceramics, and Polymers

(2008) Seong-Jun Jeong et al.   ADVANCED MATERIALS

Hierarchical Self-Assembly of Block Copolymers for Lithography-Free Nanopatterning

(2008) Bong Hoon Kim et al.   ADVANCED MATERIALS

Nanofabricated Concentric Ring Structures by Templated Self-Assembly of a Diblock Copolymer

(2008) Yeon Sik Jung et al.   NANO LETTERS

Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays

(2008) C. Tang et al.   SCIENCE

Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

(2008) R. Ruiz et al.   SCIENCE

Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

(2008) I. Bita et al.   SCIENCE

TiO[sub 2]∕Al[sub 2]O[sub 3]∕TiO[sub 2] Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition

(2007) Woojin Jeon et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS