Aligned silicon nanofins via the directed self-assembly of PS-b-P4VP block copolymer and metal oxide enhanced pattern transfer

Title
Aligned silicon nanofins via the directed self-assembly of PS-b-P4VP block copolymer and metal oxide enhanced pattern transfer
Authors
Keywords
-
Journal
Nanoscale
Volume 7, Issue 15, Pages 6712-6721
Publisher
Royal Society of Chemistry (RSC)
Online
2015-03-16
DOI
10.1039/c4nr07679f

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