Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors
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Title
Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors
Authors
Keywords
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Journal
NATURE MATERIALS
Volume 22, Issue 9, Pages 1078-1084
Publisher
Springer Science and Business Media LLC
Online
2023-08-04
DOI
10.1038/s41563-023-01626-w
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