Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors
出版年份 2023 全文链接
标题
Scalable integration of hybrid high-κ dielectric materials on two-dimensional semiconductors
作者
关键词
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出版物
NATURE MATERIALS
Volume 22, Issue 9, Pages 1078-1084
出版商
Springer Science and Business Media LLC
发表日期
2023-08-04
DOI
10.1038/s41563-023-01626-w
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